Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.07a
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- Pages.138-138
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- 2001
Adsorption and decomposition of dimethylisopropylsilane on Si(111) surface
- Yang, T.S. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Cho, S.J. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Boo, J.H. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Lee, J.W. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Lee, S.B. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Kim, Y. (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
- Published : 2001.07.05
Abstract
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