한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 제21회 학술발표회 초록집
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- Pages.130-131
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- 2001
13.56 MHz discharge at atmospheric pressure & its possibilities for surface modification of material
- Alexandrov, A.F. (Physical Faculty of Moscow State University) ;
- Bugrov, G.E. (Physical Faculty of Moscow State University) ;
- Kondranin, S.G. (Plasma Tech. Co., Ltd.) ;
- Kralkina, E.A. (Plasma Tech. Co., Ltd.) ;
- Pavlov, V.B. (Plasma Tech. Co., Ltd.) ;
- Plaksin, V. (Physical Faculty of Moscow State University) ;
- Sergeenko, V.Yu. (Physical Faculty of Moscow State University) ;
- Timofeev, I.B. (Physical Faculty of Moscow State University) ;
- Choi, W.K. (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Vavilin, K.V. (Plasma Tech. Co., Ltd.)
- 발행 : 2001.07.05