한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 제21회 학술발표회 초록집
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- Pages.95-95
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- 2001
The electrical and optical properties of high sheet resistance ITO films deposited by double erosion MSS
- Son, Young-Ho (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Jung, Myoung-Hyo (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Baek, Min (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Kim, Eun-Do (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Yoon, Jong-Man (R&D Center, Alpha-Plus Co., Ltd. Uiduk University)
- 발행 : 2001.07.05