Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.07a
- /
- Pages.75-75
- /
- 2001
Si/$SiO_2$ -nanostructure의 제작 및 C-V특성에 관한 연구
- Gang, Yun-Muk (Quantum-Functional Semiconductor Research Center in Dongguk University) ;
- Lee, Se-Jun (Quantum-Functional Semiconductor Research Center in Dongguk University) ;
- Sim, Yeong-Seok (Quantum-Functional Semiconductor Research Center in Dongguk University) ;
- Gang, Tae-Won (Quantum-Functional Semiconductor Research Center in Dongguk University) ;
- Kim, Hyeon-Jeong (Quantum-Functional Semiconductor Research Center in Dongguk University) ;
- Song, Min-Gyu (Quantum-Functional Semiconductor Research Center in Dongguk University) ;
- Kim, Deuk-Yeong (Quantum-Functional Semiconductor Research Center in Dongguk University)
- Published : 2001.07.05
Abstract
Keywords