Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.07a
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- Pages.70-70
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- 2001
The changes of chemical bonding of nitrogen with varying the oxygen incorporation within the indium oxy-nitride then films.
- Yi, Yeon-Jin (Institute of physics and applied physics and Atomic scale surface science research center, Yonsei University) ;
- Roh, Y.S. (Institute of physics and applied physics and Atomic scale surface science research center, Yonsei University) ;
- Chung, Yong-Duck (Institute of physics and applied physics and Atomic scale surface science research center, Yonsei University) ;
- Kim, Shin-Cheul (Institute of physics and applied physics and Atomic scale surface science research center, Yonsei University) ;
- Shin, Hyun-Joon (Beamline Research Division, Pohang Accelerator Laboratory, Pohang University of Science and Technology) ;
- Jeong, Kwang-Ho (Institute of physics and applied physics and Atomic scale surface science research center, Yonsei University)
- Published : 2001.07.05
Abstract
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