한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 제21회 학술발표회 초록집
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- Pages.50-50
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- 2001
Deposition of $ZrO_2$ thin films using RF magnetron sputtering and characterization of their physical properties on different $O_2$ concentrations
- Shin, Y.S. (Department of Chemistry, Sungkyunkwan University) ;
- Jeong, S.H. (Department of Chemistry, Sungkyunkwan University) ;
- Bae, I.S. (Department of Chemistry, Kookmin University) ;
- Kwak, H.T. (Department of Chemistry, Kookmin University) ;
- Lee, J.W. (Department of Chemistry, Sungkyunkwan University) ;
- Lee, S.B. (Department of Chemistry, Sungkyunkwan University) ;
- Boo, J.H. (Department of Chemistry, Sungkyunkwan University)
- 발행 : 2001.07.05