한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 제21회 학술발표회 초록집
- /
- Pages.34-35
- /
- 2001
Low temperature 4H-SiC epitaxial growth on 4H-SiC (1120) and (1100) faces by organo-metallic chemical vapor deposition
- Jeong, Jae-Kueong (School of Materials Science and Engineering, Seoul National University) ;
- Um, Myung-Yoon (School of Materials Science and Engineering, Seoul National University) ;
- Na, Hoon-Joo (School of Materials Science and Engineering, Seoul National University) ;
- Kim, Bum-Seok (School of Materials Science and Engineering, Seoul National University) ;
- Song, In-Bok (School of Materials Science and Engineering, Seoul National University) ;
- Kim, Hyeong-Joon (School of Materials Science and Engineering, Seoul National University)
- 발행 : 2001.07.05