Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.07a
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- Pages.34-35
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- 2001
Low temperature 4H-SiC epitaxial growth on 4H-SiC (1120) and (1100) faces by organo-metallic chemical vapor deposition
- Jeong, Jae-Kueong (School of Materials Science and Engineering, Seoul National University) ;
- Um, Myung-Yoon (School of Materials Science and Engineering, Seoul National University) ;
- Na, Hoon-Joo (School of Materials Science and Engineering, Seoul National University) ;
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Kim, Bum-Seok
(School of Materials Science and Engineering, Seoul National University)
;
- Song, In-Bok (School of Materials Science and Engineering, Seoul National University) ;
- Kim, Hyeong-Joon (School of Materials Science and Engineering, Seoul National University)
- Published : 2001.07.05
Abstract
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