Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.204-204
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- 2001
산소 플라즈마에서의 분자살 적층성장에 의한 $Ce_{1-x}Zr_{x}O_{2}$ 박막의 성장과 구조
- Kim, Yong-Ju ;
- Herman, G.S. (EMSL, Pacific Northwest National Laboratory) ;
- Thevuthasan, S. (EMSL, Pacific Northwest National Laboratory) ;
- Peden, C.H.F. (EMSL, Pacific Northwest National Laboratory) ;
- Chambers, S.A. (EMSL, Pacific Northwest National Laboratory)
- 김용주 (대전산업대학교 공업화학과) ;
- ;
- ;
- ;
- Published : 2001.02.22
Abstract
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