Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.182-182
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- 2001
Growth of $TiO_{2}$ Thin Films on Si(100) and Si(111) Substrates Using Single Molecular Precursor by MOCVD and Comparision of Growth Mechanism and Structural Properties
- Jung, C.K. (Department of Chemistry, Sungkyunkwan University) ;
- Kang, B.C. (Department of Chemistry, Sungkyunkwan University) ;
- Chae, H.Y. (Department of Chemistry, Sungkyunkwan University) ;
- Lee, S.B. (Department of Chemistry, Sungkyunkwan University) ;
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Boo, J.H.
(Department of Chemistry, Sungkyunkwan University)
- Published : 2001.02.22
Abstract
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