Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.152-153
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- 2001
Fabrication of Semiconductor Nano-Structures for Quantum Devices
- Kim, E.K. (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
- Kim, H.J. (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
- Kim, K.M. (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
- Park, Y.M. (Semiconductor Materials Laboratory, Korea Institute of Science and Technology) ;
- Park, Y.J. (Semiconductor Materials Laboratory, Korea Institute of Science and Technology)
- Published : 2001.02.22
Abstract
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