한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 창립10주년 제20회 학술발표회
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- Pages.102-102
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- 2001
Chemical Vapor Deposition of $Ga_{2}O_{3}$ Thin Films on Si Substrates
- Kim, Doo-Hyun (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
- Yoo, Seung-Ho (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
- An, Ki-Seok (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
- Kim, Chang-Gyoun (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
- Yoo, Hee-Soo (Department of Chemistry and Institute of Basic Science, Chungbuk National University) ;
- Kim, Yun-Soo (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology)
- 발행 : 2001.02.22