Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
- /
- Pages.102-102
- /
- 2001
Chemical Vapor Deposition of $Ga_{2}O_{3}$ Thin Films on Si Substrates
- Kim, Doo-Hyun (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
- Yoo, Seung-Ho (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
-
An, Ki-Seok
(Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology)
;
- Kim, Chang-Gyoun (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
-
Yoo, Hee-Soo
(Department of Chemistry and Institute of Basic Science, Chungbuk National University)
;
-
Kim, Yun-Soo
(Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology)
- Published : 2001.02.22
Abstract
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