Chemical Vapor Deposition of $Ga_{2}O_{3}$ Thin Films on Si Substrates

  • Kim, Doo-Hyun (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
  • Yoo, Seung-Ho (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
  • An, Ki-Seok (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
  • Kim, Chang-Gyoun (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
  • Yoo, Hee-Soo (Department of Chemistry and Institute of Basic Science, Chungbuk National University) ;
  • Kim, Yun-Soo (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology)
  • Published : 2001.02.22