Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.43-44
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- 2001
Formation kinetics of Si clusters in silane HF discharges and their growth control
- Watanabe, Yukio (Graduate School of Information Science and Electrical Engineering, Kyushu University)
- Published : 2001.02.22
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