한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 춘계학술대회 논문집 센서 박막재료
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- Pages.35-37
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- 2001
염소저온플라스마에서 금속음이온의 이용
Employing of Metal Negative Ion in Halogen Plasmas
- Choi, Young-Il (Dept. of Electronics & Information, Chosun College of Science & Technology) ;
- Lee, Bong-Ju (Division of Physics and Chemistry, College of Nature Science, Chosun University) ;
- Lee, Kyung-Sub (Division of Electrical and Electronics Engineering, College of Engineering, Dong-Shin University)
- 발행 : 2001.05.11
초록
The Al etching was studied employing negative ions generated in the downstream