Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Thermal treatment effects of sputtered ITO(glass)

Sputtered ITO(glass)의 열처리 효과

  • 김호수 (영동대학교 정보 전자공학부) ;
  • 정순원 (청주대학교 전자공학과) ;
  • 구경완 (영동대학교 정보 전자공학부)
  • Published : 2001.11.08
Download PDF
⟨ Previous Next ⟩

Abstract

Indium Tin Oxide(ITO) thin films have been fabricated by the dc magnetron sputtering technique with a target of a mixture $In_{2}O_{3}$(90mol%) and $SnO_{2}$(10mol%). We prepared ITO thin films with substrate temperature 200 to $400^{\circ}C$ and annealing temperature 200 to $500^{\circ}C$. Good polycrystalline-structured ITO films with a low electrical resistivity of $3.4{\times}10^{-4}\Omega{\cdot}cm$ have been obtained. The visible light transmittance of all obtained films was over 80 %.

Keywords