한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

이온빔 스퍼터법으로 제작한 Bi 초전도 박막의 상안정 영역

Phase Stability Region of Bi-superconductor Thin Films Prepared by IBS Technique

  • 임중관 (동신대학교 전기전자공학부) ;
  • 천민우 (동신대학교 전기전자공학부) ;
  • 박용필 (동신대학교 전기전자공학부)
  • 발행 : 2001.11.08
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초록

Bi-2212 and Bi-2223 thin films are prepared by IBS(ion beam sputtering) technique. Three phases of Bi-2201, Bi-2212 and Bi-2223 appear as stable ones in spite of the conditions for thin film fabrication of Bi-2212 and Bi-2223 compositions, depending on substrate temperature($T_{sub}$) and ozone pressure( $PO_3$ ). It is found out that these phases show similar $T_{sub}$ and $PO_3$ dependence, and that the stable regions of these phases are limited within very narrow temperature.

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