한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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- Pages.226-229
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- 2001
Ramp method로 제작한 ZnO 박막의 특성
Characteristcs of ZnO thin film by Ramp method
- 발행 : 2001.11.08
초록
To achieve ZnO layer with a high resistance, a new sputtering method with a Ramp method and cycled power process mode was developed. The specific resistance of the layers was in rang of