Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2001.06d
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- Pages.348-353
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- 2001
Probing of Microscale Phase-Change Phenomena Based on Michelson Interforometry
Michelson 간섭계를 응용한 미세 상변화 현상 계측
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Kim, Dong-Sik
;
- Park, Hee-K. (IBM Storage Technology Division) ;
- Grigoropoulos, Costas P. (Department of Mechanical Engineering, University of California at Berkeley)
- Published : 2001.06.27
Abstract
Experimental schemes that enable characterization of phase-change phenomena in the micro scale regime is essential for understanding the phase-change kinetics. Particularly, monitoring rapid vaporization on a submicron length scale is an important yet challenging task in a variety of laser-processing applications, including steam laser cleaning and liquid-assisted material ablation. This paper introduces a novel technique based on Michelson interferometry for probing the liquid-vaporization process on a solid surface heated by a KrF excimer laser pulse (