Design and analysis of tactile sensor for tri-axial force measurement using FEM

유한요소해석을 이용한 3축 힘 촉각센서 설계 및 해석

A sensing element for tri-axial force measurement, unit sensor of tactile sensor, was designed and evaluated by using finite element method (ANSYS). The sensor has a maximum force range of ${\pm}10$ N in the x, y, and z direction. Optimal cell structures and piezoresistor positions were determined by the strain distribution obtained from finite element analysis. Finally three Wheatstone birdge circuits were arranged and verified by $F_x$, $F_y$, and $F_z$ loading conditions. In addition, in case of sensing element subjected to thermal loading, the outputs of three bridge circuits were also evaluated.