Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2001.06e
- /
- Pages.169-174
- /
- 2001
Development of MEMS-based Micro Turbomachinery
MEMS-based 마이크로 터보기계의 개발
- Park, Kun-Joong ;
- Min, Hong-Seok ;
- Jeon, Byung-Sun ;
-
Song, Seung-Jin
;
-
Joo, Young-Chang
;
-
Min, Kyoung-Doug
;
- You, Seung-Mun
- 박건중 (서울대학교 기계항공공학부 대학원) ;
- 민홍석 (서울대학교 재료공학부 대학원) ;
- 전병선 (서울대학교 기계항공공학부 대학원) ;
-
송성진
(서울대학교 기계항공공학부)
;
-
주영창
(서울대학교 재료공학부)
;
-
민경덕
(서울대학교 기계항공공학부)
;
- 유승문 (서울대학교 기계항공공학부)
- Published : 2001.06.27
Abstract
This paper reports on the development of high aspect ratio structure and 3-D integrated process for MEMS-based micro gas turbines. To manufacture high aspect ratio structures, Deep Reactive Ion Etching (DRIE) process have been developed and optimized. Specially, in this study, structures with aspect ratios greater than 10 were fabricated. Also, wafer direct bonding and Infra-Red (IR) camera bonding inspection systems have been developed. Moreover, using glass/silicon wafer direct bonding, we optimized the 3-D integrated process.
Keywords