Analysis of Ferroelectric RAM Device by Transmission ElectronMicroscopy : its Tasks and Analytical Difficulties

• Baek, Hyeon-Seok (Analytical Engineering Center, Samsung Advanced Institute of Technology) ;
• Park, Gyeong-Su (Analytical Engineering Center, Samsung Advanced Institute of Technology) ;
• Song, Se-an (Analytical Engineering Center, Samsung Advanced Institute of Technology) ;
• Lee, Jun-Gi (Material & Device Laboratory, Samsung Advanced Institute of Technology) ;
• Sinclair, Robert (Department of Materials Science and Engineering, Stanford University)

• 백현석 ;
• 박경수 ;
• 송세안 ;
• 이준기 ;

• Published : 2001.11.01

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