한국전자현미경학회:학술대회논문집
- 한국현미경학회 2001년도 제32차 추계학술대회
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- Pages.18-22
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- 2001
A Site Specific Characterization Technique and Its Application
- Kamino, T. (Hitachi Science Systems, Ltd.) ;
- Yaguchi, T. (Hitachi Science Systems, Ltd.) ;
- Ueki, Y. (Hitachi Science Systems, Ltd.) ;
- Ohnish, T. (Instruments Group, Hitachi Ltd.) ;
- Umemura, K. (Central Research Laboratory, Hitachi Ltd.) ;
- Asayama, K. (Semiconductor and Integrated Circuit Group, Hitachi Ltd.)
- 발행 : 2001.11.01
초록
A technique to characterize specific site of materials using a combination of a dedicated focused ion beam system(FIB), and Intermediate-voltage scanning transmission electron microscope(STEM) or transmission electron microscope(TEM) equipped with a scanning electron microscope(SEM) unit has been developed. The FIB system is used for preparation of electron transparent thin samples, while STEM or TEM is used for localization of a specific site to be milled in the FIB system. An FIB-STEM(TEM) compatible sample holder has been developed to facilitate thin sample preparation with high positional accuracy Positional accuracy of
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