대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

Cyclic 증착방법에 의해성장된 다이아몬드 박막의 cathodoluminescence 특성에 관한 연구

Cathodoluminescence Study of Diamond Films Grown by Cyclic Deposition Method

  • 서수형 (한양대학교 전자재료 및 부품연구센터) ;
  • 신완철 (한양대학교 공학대학 전기공학과) ;
  • 박진석 (한양대학교 공학대학 전기공학과)
  • Seo, Soo-Hyung (Center for Electronic Materials and Components, Hanyang University) ;
  • Shin, Wan-Chul (Dept. of Electrical Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electrical Engineering, Hanyang University)
  • 발행 : 2001.11.03
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초록

Polycrystalline diamond films are deposited by cyclic method. modulating the $H_2$ Plasma and $CH_4+H_2$ plasma during the growth step. Diamond quality is evaluated by FWHM and $I_D/I_G$ ratio obtained from Raman spectroscopic analysis. Structural defects and impurities generated during the growth step are characterized by cathodoluminescence, and the variations between band-A(430 nm) line and nitrogen-related(578 nm) line are investigated as a function of $T_E/T_G$. Furthermore, the correlations between preferential orientation. film morphologies and CL characteristics are also investigated.

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