Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Cathodoluminescence Study of Diamond Films Grown by Cyclic Deposition Method

Cyclic 증착방법에 의해성장된 다이아몬드 박막의 cathodoluminescence 특성에 관한 연구

  • Seo, Soo-Hyung (Center for Electronic Materials and Components, Hanyang University) ;
  • Shin, Wan-Chul (Dept. of Electrical Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electrical Engineering, Hanyang University)
  • 서수형 (한양대학교 전자재료 및 부품연구센터) ;
  • 신완철 (한양대학교 공학대학 전기공학과) ;
  • 박진석 (한양대학교 공학대학 전기공학과)
  • Published : 2001.11.03
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Abstract

Polycrystalline diamond films are deposited by cyclic method. modulating the $H_2$ Plasma and $CH_4+H_2$ plasma during the growth step. Diamond quality is evaluated by FWHM and $I_D/I_G$ ratio obtained from Raman spectroscopic analysis. Structural defects and impurities generated during the growth step are characterized by cathodoluminescence, and the variations between band-A(430 nm) line and nitrogen-related(578 nm) line are investigated as a function of $T_E/T_G$. Furthermore, the correlations between preferential orientation. film morphologies and CL characteristics are also investigated.

Keywords