Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2001.07e
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- Pages.76-79
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- 2001
Analysis of Energy Distribution Function in $SiH_4$ Gas
$SiH_4$ 가스의 에너지 분포함수 관한 연구
- Seong, Nak-Jin (Incheon City College) ;
- Kim, Sang-Nam (Incheon City College)
- Published : 2001.07.10
Abstract
Energy distribution function in
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