Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Measurement error reduction technique for the Semiconductor Device DC Characteristic Measurement System

반도체 소자의 직류특성 측정 시스템에서의 저전류 측정 오차 감소 기법

  • Choi, In-Kyu (Dept. of Electronic Engineering, Kyunpook National University) ;
  • Jung, Hae-Yone (Dept. of Electronic Engineering, Kyunpook National University) ;
  • Park, Jong-Sik (Dept. of Electronic Engineering, Kyunpook National University)
  • 최인규 (경북대학교 전자공학과) ;
  • 정해용 (경북대학교 전자공학과) ;
  • 박종식 (경북대학교 전자공학과)
  • Published : 2001.11.24
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Abstract

In this paper, we proposed measurement error reduction technique for the semiconductor device DC characteristic measurement system. Implemented system is composed of 4 SMUs, 2 VSUs, and 2 VMUs. Various efforts in hardware and software have been made to reduce the measurement errors due to the leakage current in measurement circuits. Internal and external sources of errors in measurement system especially in pA range measurement have been identified and removed. Experimental results show that the implemented system can be measure the DC characteristic of semiconductor devices in pA level.

Keywords