대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 추계학술대회 논문집 전기기기 및 에너지변환시스템부문
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- Pages.9-11
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- 2001
자기부상 stage 구동 리니어 모터의 설계 및 특성해석
Design and Characteristic Analysis of a Linear Motor for Magnetic Levitation
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Kang, Gyu-Hong
(Dept. of Electric Engineering, Chang-Won University) ;
- Ahn, Ho-Jin (Dept. of Electric Engineering, Chang-Won University) ;
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Hong, Jung-Pyo
(Dept. of Electric Engineering, Chang-Won University) ;
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Kang, Do-Hyun
(Korea Electro-technology Research Institute(KERI))
- 발행 : 2001.10.26
초록
This paper deals with design and characteristic analysis of a permanent magnet linear synchronous motor for magnetic levitation stage of semi-conductor manufacture machine. In order to improve the control performance by detent force minimization, skew and PM offset method are used.
키워드