한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)

한국소음진동공학회 (The Korean Society for Noise and Vibration Engineering)
권호 표지

고밀도 HDD 용 MEMS 마이크로 액추에이터의 동적 해석

Dynamic Characterizations of a MEMS Microactuator for High Density Hard Disk Drive

  • 김철순 (삼성종합기술원 Microsystems Lab) ;
  • 전종업 (삼성종합기술원 Microsystems La) ;
  • 정성환 (삼성종합기술원 Microsystems La) ;
  • 최재준 (삼성종합기술원 Microsystems La) ;
  • 민동기 (삼성종합기술원 Microsystems La) ;
  • 김영훈 (삼성종합기술원 Microsystems Lab)
  • 발행 : 2001.05.01
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초록

This paper presents the fabrication and testing results of a dual stage microactuator system for fine positioning of magnetic heads in hard disk drives. An electrostatic rotary microactuator was newly designed and fabricated. The microactuator was integrated into the head gimbal assembly of a disk drive system and its dynamic characteristics were investigated. Experimental results show that natural frequency and voltage gain of the microactuator are 4.3 KHz and 25 nm/V and the dual stage microactuator system achieves the tracking accuracy of 30 nm.

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