극 초정밀 측정시스템의 미진동제어를 위한 구조물의 동적 설계에 관한 연구

A Study on the Dynamic Design of Structure for Sub-Vibration Control of Precision Measuring System

It is necessary to design th anti-vibration system of precision machinery for a sound operation and a quality assurance. However, in general. the allowable vibration limit is not well known. In the paper, the vibration criteria for foundation of vibration sensitive machinery is proposed and anti-vibration system is designed by using vibration measurement results of foundation. Also, the F.E. analysis is performed to verify the effectiveness of a designed anti-vibration system and to determine allowable dynamic load of machinery