Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2001.11a
- /
- Pages.36-36
- /
- 2001
A study on the deposition of chromium nitride using inductively coupled plasma
유도결합 플라즈마 증발법을 이용한 CrN 박막 증착에 관한 연구
Abstract
Keywords