Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2001.06a
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- Pages.70-71
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- 2001
Structural and Electrical Characteristics by Anneal ing Temperatures of the a-SiC:H Thin Films Deposited by PECVD
PECVD법으로 증착시킨 a-SiC:H박막의 열처리온도 변화에 따른 특성분석
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