Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2001.10a
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- Pages.711-714
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- 2001
Treatment of Waste Dry Etching Gas in Semiconductors Manufacturing Process
- Yamamoto, Hideki (Department of Chemical Engineering, Faculty of Engineering, Kansai University) ;
- Kawahara, Takahiro (Department of Chemical Engineering, Faculty of Engineering, Kansai University) ;
- Shibata, Junji (Department of Chemical Engineering, Faculty of Engineering, Kansai University)
- Published : 2001.10.01
Abstract
A new technology to make fluoride gas such as NF
Keywords