대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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- Pages.415-420
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- 2001
The Condition of Optimum Coagulation for Recycling Water from CMP Slurry
- Seongho Hong (Department of Chemical and Environmental Engineering, Soongsil University) ;
- Oh, Suck-Hwan (Department of Chemical and Environmental Engineering, Soongsil University)
- 발행 : 2001.10.01
초록
Water usage in the semiconductor industries is dramatically increased by not only using bigger wafer from 8 inches to 12 inches but also by adapting new process such as Chemical Mechanical Planarization (CMP) process invented by IBM in late '80. However, The document published by International Semiconductor Association suggests the decreasing ultra pure water (UPW) use from 22 gallon/in