Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 2001.07a
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- Pages.146-150
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- 2001
Nanotribological Characterization of Fluorocarbon Thin Film by Plasma Enhanced CVD
- Kim, Tae-Gon (Metallurgy and Materials Engineering, Hanyang Univ.) ;
- Lee, Su-Youn (Metallurgy and Materials Engineering, Hanyang Univ.) ;
- Park, Jin-Goo (Metallurgy and Materials Engineering, Hanyang Univ.) ;
- Shin, Hyung-Jae (Core Technology Research Center, Samsung electronics Co. Ltd.)
- Published : 2001.07.01
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