Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 2001.04a
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- Pages.49-56
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- 2001
Synthesis of Large-area CVD Diamond Wafer by Single-cathode DC PACVD for Thermal Management
- Lee, Wook-Seong (Diamond and Related Materials Lab. Thin Film Technology Research Center) ;
- Baik, Young-Joon (Diamond and Related Materials Lab. Thin Film Technology Research Center)
- Published : 2001.04.01
Abstract
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