Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 2001.11a
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- Pages.165-170
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- 2001
Fabrication of SAW device by using AIN thin films
AIN박막을 이용한 SAW소자의 제조
Abstract
AIC
Keywords
AIC