AlN 완충층을 이용한 Si(111) 기판위에 GaN 성장특성에 관한 연구

Growth Characteristics of GaN on Si(111) using AlN buffer layer

  • Jung, Sung-Hoon (School of Metallurgical and Materials Engineering, SungkyungKwan University) ;
  • Lee, Jeopng-Wook (School of Metallurgical and Materials Engineering, SungkyungKwan University) ;
  • Shin, Hui-Young (School of Metallurgical and Materials Engineering, SungkyungKwan University) ;
  • Yang, Cehol-Woong (School of Metallurgical and Materials Engineering, SungkyungKwan University) ;
  • Lee, snag-Hak (School of Metallurgical and Materials Engineering, SungkyungKwan University) ;
  • Yoo, Ji-Beom (School of Metallurgical and Materials Engineering, SungkyungKwan University) ;
  • Lee, In-Whan (Samsung Advanced Institute of Technology)
  • 발행 : 2001.11.01