Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.05a
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- Pages.119-119
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- 2001
Dry Etching of ZnO films in $Cl_2/Ar$ Inductively Coupled Plasmas
ZnO 박막의 청색 $Cl_2/Ar$ 플라즈마 식각
Abstract
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