Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.05a
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- Pages.109-109
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- 2001
Microsturcture control of copper films by addition of molybdenum in an advanced metallization process
Mo 첨가에 의한 구리 박막의 미세구조 제어
Abstract
Keywords