Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.05a
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- Pages.82-82
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- 2001
Electrical properties of hafnium dioxide gate dielectrics by atomic layer deposition
원자층증착법을 이용한 Hafnium dioxide 박막의 전기적 특성
Abstract
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