한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2001년도 춘계학술발표강연 및 논문개요집
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- Pages.75-75
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- 2001
Level Set 방법을 이용한 Si의 고밀도 프라즈마 식각 프로화일 모사
Simulation of Silicon Etch Profiles in High Density Plasmas Using a level Set Method
- Im, Yeon-Ho (School of Chemical Engineering and Technology, Semiconductor Physics Research Center, Chonbuk National University) ;
- Park, Jin-Soo (School of Chemical Engineering and Technology, Semiconductor Physics Research Center, Chonbuk National University) ;
- Hahn, Yoon-Bong (School of Chemical Engineering and Technology, Semiconductor Physics Research Center, Chonbuk National University)
- 발행 : 2001.05.01