Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.05a
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- Pages.75-75
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- 2001
Simulation of Silicon Etch Profiles in High Density Plasmas Using a level Set Method
Level Set 방법을 이용한 Si의 고밀도 프라즈마 식각 프로화일 모사
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Im, Yeon-Ho
(School of Chemical Engineering and Technology, Semiconductor Physics Research Center, Chonbuk National University)
;
- Park, Jin-Soo (School of Chemical Engineering and Technology, Semiconductor Physics Research Center, Chonbuk National University) ;
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Hahn, Yoon-Bong
(School of Chemical Engineering and Technology, Semiconductor Physics Research Center, Chonbuk National University)
- Published : 2001.05.01
Abstract
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