Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11a
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- Pages.226-229
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- 2001
Characteristics of ZnO thin film by Ramp method
Ramp method로 제작한 ZnO박막의 특성
Abstract
To achieve ZnO layer with a high resistance, a new sputtering method with a Ramp method and cycled power process mode was developed. The specific resistance of the layers was in rang of 3*10