한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 추계학술대회 논문집
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- Pages.554-557
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- 2001
Sputtered ITO(glass)의 열처리 효과
Thermal treatment effects of sputtered ITO(glass)
초록
Indium Tin Oxide(ITO) thin films have been fabricated by the dc magnetron sputtering technique with a target of a mixture In