Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.07a
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- Pages.1036-1038
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- 2001
Sapphire orientation dependence of the crystallization of ZnO thin films
사파이어 기판의 방향에 따른 ZnO 박막의 결정화 거동
Abstract
The sapphire orientation dependence of the crystallization of ZnO thin films has been studied using real-time synchrotron x-ray scattering. The amorphous ZnO thin films with a 2400-