Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The study of AC characteristics of the thin film resistor

박막저항의 교류특성에 관한 연구

  • 류제천 (한국표준과학연구원 전기자기그룹 전기실) ;
  • 김동진 (한국표준과학연구원 전기자기그룹 전기실) ;
  • 김한준 (한국표준과학연구원 전기자기그룹 전기실) ;
  • 나필선 (한국표준과학연구원 전기자기그룹 전기실) ;
  • 유광민 (한국표준과학연구원 전기자기그룹 전기실)
  • Published : 2001.07.01
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Abstract

We were fabricated of NiCr thin film resistors on A1$_2$O$_3$and SiO$_2$/Si substrates by dc magnetron sputtering system. The AC characteristics of resistors were studied. The cut-off frequency were found >10 MHz for the resistors with 39 ohm value of Alumina substrates, but the cut-off frequency were found 400 kHz for the resistors with 168 ohm value of SiO$_2$/Si substrates. In high frequency applications, the substrate selection is the most important factor.

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