한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
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- Pages.729-732
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- 2001
$O_2/(Ar+O_{2})$ 비에 따른 바나듐 산화막의 구조적, 전기적 특성
The Structural and Electrical Properties of Vanadium Oxide Thin Films as $O_2/(Ar+O_{2})$ ratio
초록
In this study, the effect of oxygen partial pressure on the electrical properties of vanadium oxide(VO