Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A study on a Glucose Sensor Fabricated by Micromachining

마이크로머시닝 기술을 이용하여 제작한 포도당 센서에 관한 연구

  • 최석민 (순천향대학교 전기공학과) ;
  • 노일호 (순천향대학교 전기공학과) ;
  • 양성준 (순천향대학교 전기공학과) ;
  • 김창교 (순천향대학교 전기공학과) ;
  • 유홍진 (순천향대학교 전기공학과) ;
  • 박효덕 (순천향대학교 전기공학과)
  • Published : 2001.07.01
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Abstract

In this study, a micro-glucose sensor was fabricated by micromachining technology and its sensing characteristics were investigated. The 7740 pyrex glass was used as the bottom substrate and anisotropically etched silicon wafer was used as the top substrate. The size of the fabricated microchip is 1.58${\times}$1.58mm$^2$. It is shown that output current exhibits a linear change according to glucose concentration (100 mM ∼ 300 mM). It is also shown that the response time for glucose was within 240 sec. It was followed by a saturation trend within 50 sec. The g1ucose sensor with Fc$\^$+/ exhibits relatively higher sensitivity than that without Fc$\sub$+/ for output current.

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