한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
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- Pages.355-357
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- 2001
분위기 산소압 변화에 따른 ZnO 박막의 발광특성 변화
Ultraviolet and green emission property of ZnO thin film grown at various ambient pressure
초록
ZnO thin films were deposited on (001) sapphire substrate at various ambient gas pressure by pulsed laser deposition(PLD). Oxygen was used as ambient gas, and oxygen gas pressure was varied from 1.0